RTM participates in MOTIE appointed national project – ‘Real-time process control for ALE equipment’

Manufacturing AI solutions provider, RTM has been selected to develop semiconductor process by MOTIE (Ministry of Trade, Industry, and Energy).

RTM formed a research consortium with semiconductor equipment maker, PSK and big data platform lab, UDS to develop “ALE tools with real time control’ for the 2020 Industry Technology Challenge Track for Next Generation Semiconductor Manufacturing Development.

The consortium is led by PSK with RTM, UDS, HanYang University, ChungAng University, and SungKyunKwan University receiving 6B krw funding until the year 2023.

Through this government project, the consortium aims to overcome the challenges of precise nanometer patterning that traditional etching equipment could not produce. The ultimate goal of the consortium is to develop a system that can collect real time process data for an AI can detect and control each process tool.

RTM Founder, KiSuk Sung stated, “traditional ALE process tools not only fell behind in technology, but also is very difficult to detect and control the processes. By collaborating with professional research labs and industry-academic relations, we hope to develop an industry-leading ALE tool.”